Investigation into real-time pressure sensing properties of SnO2, TiO2, and TiO2/ZnO thick films with interdigitated electrodes

The pressure sensing properties of nanocomposite SnO2, TiO2, and TiO2/ZnO thick film capacitors with interdigitated electrodes are investigated. To form the dielectric layers, the metal oxides powders were respectively mixed with isopropanol, wet ball milled for 24 h, then the mixtures were dried at 120 °C and further the powders were placed under 2 tonnes of pressure to form pellets, which were fired at 1250 °C (rate of 5 °C/min) in a vacuum of 6 × 10−3 mbar for 5 h, followed by cooling (rate of 3 °C/min). After firing, the resultant nanopowders were mixed with 7 wt.% of polyvinyl butyral (binder) and suitable amount of ethylenglycolmonobutylether (solvent) to form the pastes. These were screen-printed over the Ag electrodes on alumina substrates to form SnO2, TiO2, and TiO2/ZnO capacitor pressure sensors accordingly. The evaluation of pressure sensing properties of these sensors was performed using a HP 4192A Impedance Analyser, which recorded the changes in the values of the capacitances under different mechanical stresses. At the applied load of 5 kPa, the response times of 2.5 s, 5.6 s and 4 s were recorded for SnO2, TiO2, and TiO2/ZnO sensors, respectively. In addition to instant response times, these pressure sensors have the advantage of being reusable, as their electrical properties were restored to the original value after annealing for 2 h at 80 °C. Moreover, one year later after the initial testing, the sensors were still operational and produced similar time responses to pressure.

► The pressure sensing properties of metal oxides thick film capacitors are reported.
► At the applied load of 5 kPa, the response times of 2.5 s, 5.6 s and 4 s were recorded for SnO2, TiO2, and TiO2/ZnO sensors, respectively.
► These pressure sensors have long-term stability and low hysteresis.
► They are reusable, as their electrical properties were restored by annealing.