Characterization of the deflection of a new epitaxial piezoelectric micro-mirror: Modeling and experiment

Advanced 3D finite element analysis of a newly designed piezoelectric micro-mirror device was conducted to assess a priori the attainable deflection of micro-mirror. The deflection of micro-mirror has shown to vary with the competitions and/or cooperative interactions among deposited layers. The device was successfully fabricated using a heteroepitaxial growth process with Pt/PZT(1 1 1)/Pt(1 1 1)/γ-Al2O3(1 1 1)/Si(1 1 1) structure. Material anisotropy and technologically induced residual stress have shown to play a significant role on the deflection of micro-mirror. A good correlation was found between simulation results and experimentally measured deflection of fabricated micro-mirror.