Controlling electromagnetic wave through dual heights micro-lens array of a CMOS image sensor

We demonstrate control of electromagnetic (EM) wave through dual heights micro-lens (DHML) array in 1.1 μm pixel size complementary metal oxide semiconductor image sensor. The sensitivity and signal-to-noise ratio (SNR) are significantly improved (>10%) using the DHML structure. This DHML structure acts as an array of fundamental waveguides to enhance the optical throughput and to suppress the spatial crosstalk that is confirmed by evaluating the pixel performance in terms of the confinement factor of fundamental mode in this DHML structure.