Versatile method for adjusting fabrication errors of guided-mode resonance filters

Guided-mode resonance filters (GMRFs) are very promising optical devices because of their superior spectral performance; however, their fabrication is difficult to implement due to their high intrinsic sensitivity to structural parameters. In this paper, the influence of the error associated with each parameter on the spectral response is investigated in detail. The period, fill factor, and refractive index of the grating layer are found to be the major factors. A versatile method for adjusting the parameter errors is proposed, which includes adjusting certain parameters of the grating layer during fabrication and the refractive index of a tunable layer during practical use. Numerical results show that in the scope of this discussion, almost all the fabrication errors can be compensated by this multi-dimensional adjustment method.