Guide-mode resonance characteristics of periodic structure on base of diamond-like carbon film

We present the study based on rigorous coupled-wave analysis and the S-matrix method to evaluate guide-mode resonance characteristics in the visible range of periodic subwavelength structure fabricated by holographic lithography. This structure consists of a single one-dimensional grating dry etched in a diamond-like carbon film on fused silica substrate. It is shown that reflection spectra of such structure have single peak at normal incidence and two peaks at oblique incidence. Peak positions strongly depend on the grating period and thickness of the waveguide layer. Moreover, the simulation results show that the shift of the second peak in the spectral reflectance is less sensitive to the change of certain structural parameters and is more sensitive to the change of the refractive index of the surrounding medium. It is shown that the simulation results can be employed for the interpretation of optical response obtained from guide-mode resonance optical sensors.