Back focal plane microscopic ellipsometer with internal reflection geometry

A back focal plane (BFP) ellipsometer is presented to measure a thin film on a cover glass using an oil-immersion high-numerical-aperture objective lens. The internal reflection geometry lowers the pseudo Brewster angle (ϕB) to the range over which the light distribution is observed in BFP of the objective. A calculation based on Mueller matrix was developed to compute ellipsometric parameters from the intensity distribution on BFP. The center and radius of the partial reflection region below the critical angle were determined and used to define a polar coordinate on BFP. Harmonic components were computed from the intensities along the azimuth direction and transformed to ellipsometric parameters at multiple incident angles around ϕB. The refractive index and thickness of the film and the contributions of the objective effect were estimated at the same time by fitting.