Fabrication of dual-focus dual-layered microlens

Novel structure of dual-focus microlens array with dual layers is proposed. Dual-focus microlenses formed by combination of dual layers of concentric spherical lenses are fabricated through photo lithography and dry etching processes. The dual lens is formed by combination of a thermally reflowed photo resist lens on a fused quartz lens which is formed by dry etching of the fused quartz substrate.