Inverse relationships for ellipsometry of uniaxially anisotropic nanoscale dielectric films on isotropic materials

The possibilities of determining the optical parameters of uniaxially anisotropic non-absorbing ultrathin films on the basis of ellipsometric parameters are analyzed in the framework of a long-wavelength approximation. It is shown that the special convenience of this analytical approach lies in the fact that it enables to find out the situations where it is possible to decouple the optical constants and the thickness (to provide correlation-free measurements) of an anisotropic ultrathin film. The accuracy of the obtained formulas for determining the parameters of ultrathin films is estimated by computer simulation of the reflection problem on the basis of the exact electromagnetic theory for anisotropic layered systems.