کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1536998 | 996578 | 2011 | 5 صفحه PDF | دانلود رایگان |
![عکس صفحه اول مقاله: Deformable mirrors based on piezoelectric unimorph microactuator array for adaptive optics correction Deformable mirrors based on piezoelectric unimorph microactuator array for adaptive optics correction](/preview/png/1536998.png)
This paper describes a piezoelectric deformable mirror (DM) for adaptive optics (AO) applications, with a 100 μm thick silicon mirror driven by 61 unimorph microactuators. Measurement results show that the stroke of the DM is ~ 7.4 μm at 100 V, and the resonance frequency is at 18 kHz. To demonstrate the correction capability of the DM, low-order Zernike modes up to 14th term were reproduced. Furthermore, a close-loop correction of laser beam in a 633 nm helium-neon laser system was performed. After system aberrations being compensated, a focal spot approximate to Airy disk was achieved.
► Deformable mirror based on piezolectric unimorph microactuator array was developed.
► The device has a large stroke with low operating voltage.
► Low-order Zernike modes were reproduced.
► Close-loop correction of laser beam was performed.
► The device can be satisfying for adaptive optics applications.
Journal: Optics Communications - Volume 284, Issue 21, 1 October 2011, Pages 5062–5066