Polarization effect of femtosecond pulse breakdown in subwavelength antireflective relief grating

The transmittance property and the near-field distribution of subwavelength broadband antireflective grating directly patterned into the wide bandgap dielectric material as a function of the surface period and groove depth are performed by a rigorous Fourier modal method. It is found that the transmittivity is insensitive for TE and TM polarization, but the near-field distribution associated with laser damage resistance ability is strongly dependent on polarization state of incident light. What's more, the femtosecond pulse laser damage threshold of surface structure taking into account local maximum electric field enhancement was calculated numerically using a theoretical ionization mechanism model. The higher threshold on the surface period, pulse duration and incident wavelength for TM polarization than that for TE wave is demonstrated quantitatively.