کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1538252 | 996607 | 2008 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Profilometry with compact single-shot low-coherence time-domain interferometry
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
مواد الکترونیکی، نوری و مغناطیسی
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
We describe the performance of a compact single-shot low-coherence interferometric scheme that can be capable of measuring three-dimensional surface profiles and shape. This technique utilizes a polarizing Michelson interferometer and a four-channel polarization phase-stepper optics, which is based on a paired wedge prism, a combined wave plate and a Wollaston prism. The coherence gated surface image can be calculated by the simultaneous acquisition of two interferograms and a DC image on a single CCD camera. The image calculation is based on a novel algorithm to calibrate the imbalanced intensity as well as the deviated arbitrary relative phase of each of the imaging channels. The system can display the transverse cross-sectional images in real-time. To demonstrate the feasibility of this system, a Japanese coin is presented as a 3-D shape measurement example with an image size of 4 mm (horizontal) Ã 4 mm (vertical) Ã 160 μm (depth).
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Optics Communications - Volume 281, Issue 18, 15 September 2008, Pages 4566-4571
Journal: Optics Communications - Volume 281, Issue 18, 15 September 2008, Pages 4566-4571
نویسندگان
Molly Subhash Hrebesh, Yuuki Watanabe, Manabu Sato,