Athermal silicon arrayed waveguide grating with polymer-filled slot structure

In this paper, an athermal silicon arrayed waveguide grating (AWG) with the assistance of a polymer-filled slot structure is proposed. Arrayed slot waveguides were used to replace arrayed silicon photonic wires (SPWs). By carefully controlling the temperature dependence of the effective index of the polymer-filled slot waveguides, the athermal silicon AWG is realized. Analysis shows that the center wavelength shift of the AWG can be down to 0.14 pm/°C.