Modeling of quasi-grating sidewall corrugation in SOI microring add-drop filters

We build a model to study the sidewall corrugation of fabricated silicon microrings and investigate its impact on the spectral response of the resonator system. From the scanning electron microscope images, the sidewall corrugation can be engineered into certain periodicity and characterized into a group of rectangular gratings, or quasi-gratings, which in turn generate mutual mode coupling between the forward- and backward-propagating modes in the ring and lead to resonance splitting. We find that the reflectivity of the quasi-gratings is proportional to the mutual coupling strength and the resonance splitting only occurs at the resonances where high reflectivity takes place. The model agrees well with the experimental measurements and provides some guideline in applying mutual mode coupling for various functions in the field of optics.