کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1540587 996664 2009 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Dual-frequency paired polarization phase shifting ellipsometer
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد مواد الکترونیکی، نوری و مغناطیسی
پیش نمایش صفحه اول مقاله
Dual-frequency paired polarization phase shifting ellipsometer
چکیده انگلیسی
A novel dual-frequency paired polarization phase shifting ellipsometer (DPPSE) is proposed and experimentally demonstrated. It combines the features of the phase shifting interferometer and common-path polarized heterodyne interferometric ellipsometer where the ellipsometric parameters (EP) of a specimen are measured accurately. The experimental results verify that DPPSE is capable of determining the full dynamic range of EP. In addition, the properties of dual-frequency paired linearly polarized laser beam in DPPSE perform in common phase noise rejection mode. It is insensitive to environmental disturbance and laser frequency noise. The capability of DPPSE to perform higher accuracy EP measurement than conventional ellipsometer is verified according to error analysis.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Optics Communications - Volume 282, Issue 8, 15 April 2009, Pages 1516-1520
نویسندگان
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