کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1541901 996698 2007 8 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
PDL free plasma enhanced chemical vapor deposition SiC optical waveguides and devices
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد مواد الکترونیکی، نوری و مغناطیسی
پیش نمایش صفحه اول مقاله
PDL free plasma enhanced chemical vapor deposition SiC optical waveguides and devices
چکیده انگلیسی

Planar silicon carbide (SiC) waveguides are proposed for fabrication on a silicon substrate with an oxide isolation layer. Using post deposition annealing it is possible to achieve low polarisation-dependent loss (PDL) within optical SiC waveguides fabricated using a low temperature deposition technique. The proposed waveguides are optically characterised and successfully used in power splitters and vibration sensors. Results before and after annealing cycles for those devices are discussed. The interesting optical characteristics of SiC waveguides as well as the first passive components presented open the way for photonic sensing in harsh environment where SiC is a very promising material.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Optics Communications - Volume 269, Issue 2, 15 January 2007, Pages 338–345
نویسندگان
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