کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1542825 | 996732 | 2006 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Determining large step heights using zero-order interference fringe identification and an external cavity diode laser
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موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
مواد الکترونیکی، نوری و مغناطیسی
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Determining large step heights using zero-order interference fringe identification and an external cavity diode laser Determining large step heights using zero-order interference fringe identification and an external cavity diode laser](/preview/png/1542825.png)
چکیده انگلیسی
Zero-order interference fringe identification is a powerful tool for measuring large step heights. In contrast to white light scanning interferometry, this study utilizes an external cavity diode laser as the light source. The zero-path difference point can be accurately identified by combining wavelength scanning interferometry, in which the laser wavelength is continuously changed, with single wavelength interferometry, in which the laser wavelength is fixed. The experimental apparatus is a two-arm interferometer containing the sample in the measurement arm. The step height denotes the distance between two locations of a zero-order interference fringe, which are obtained by continuously varying the length of the reference arm. The accuracy of a sample of 10 mm step height was found to be 0.33 μm.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Optics Communications - Volume 259, Issue 1, 1 March 2006, Pages 14-18
Journal: Optics Communications - Volume 259, Issue 1, 1 March 2006, Pages 14-18
نویسندگان
Sheng-Hua Lu, Jing-Heng Chen, Ching-Fen Kao, Yu-Ping Lan, Liang-Chih Chang,