کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1556411 | 999188 | 2015 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Influence of Substrate Negative Bias on Structure and Properties of TiN Coatings Prepared by Hybrid HIPIMS Method
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
شیمی مواد
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
TiN coatings were deposited using a hybrid home-made high power impulse magnetron sputtering (HIPIMS) technique at room temperature. The effects of substrate negative bias voltage on the deposition rate, composition, crystal structure, surface morphology, microstructure and mechanical properties were investigated. The results revealed that with the increase in bias voltage from â50 to â400 V, TiN coatings exhibited a trend of densification and the crystal structure gradually evolved from (111) orientation to (200) orientation. The growth rate decreased from about 12.2 nm to 7.8 nm per minute with the coating densification. When the bias voltage was â300 V, the minimum surface roughness value of 10.1 nm was obtained, and the hardness and Young's modulus of TiN coatings reached the maximum value of 17.4 GPa and 263.8 GPa, respectively. Meanwhile, the highest adhesion of 59 N was obtained between coating and substrate.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Materials Science & Technology - Volume 31, Issue 1, January 2015, Pages 37-42
Journal: Journal of Materials Science & Technology - Volume 31, Issue 1, January 2015, Pages 37-42
نویسندگان
Zhenyu Wang, Dong Zhang, Peiling Ke, Xincai Liu, Aiying Wang,