Microstructural characterization of pulsed plasma nitrided 316L stainless steel

► The low temperature pulsed plasma nitrided layer of 316 SS was studied. ► The plastic deformation induced in the austenite due to nitriding is characterized by EBSD at different depths (i.e., nitrogen concentration). ► Nanomechanical properties of the nitride layer was investigated by nanoindentation at different depths (i.e., nitrogen concentration). ► High hardness, high nitrogen concentration and high dislocation density is detected in the nitride layer. ► The hardness and nitrogen concentration decreased sharply beyond the nitride layer.