Fatigue strength of the Cu/Si interface in nano-components

► The fatigue behavior of nano-components consisting of Si, Cu, and SiN was examined. ► A cyclic load broke the component along the Cu/Si interface. ► The S-N curve showed that the trend was similar to that of a bulk metal. ► The fracture behavior was brittle owing to the high yield stress of Cu. ► The result was compared with that of a component with Cu of different thickness.