کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1581986 1514864 2008 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Interfacial fracture for TiN/SiNx nano-multilayer coatings on Si(1 1 1) characterized by nanoindentation experiments
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد دانش مواد (عمومی)
پیش نمایش صفحه اول مقاله
Interfacial fracture for TiN/SiNx nano-multilayer coatings on Si(1 1 1) characterized by nanoindentation experiments
چکیده انگلیسی

Fracture behavior for TiN/SiNx nano-multilayer coatings on Si(1 1 1) substrates, deposited using magnetron sputtering Ti and Si, is characterized by nanoindentation experiments, and the morphologies of the indentations are revealed by scanning electron microscopy, along with in situ atomic force microscopy (AFM) in nanoindentation experiments. During nanoindentation experiments, under the condition that the displacement limit mode is used and a strain rate is kept at 0.05/s, an interfacial (between the coating and substrate) fracture is observed as the maximum indenter displacement into the coating reaches 2500 nm, and the corresponding unloading segment in the load–displacement curve shows an obvious discontinuity. This discontinuity is attributed to the rebound of the detached film during unloading. The interfacial fracture toughness for TiN/SiNx nano-multilayer coating on Si(1 1 1), which is strongly dependent on the preferred orientation for the TiN layer as well as the interfaces between TiN and SiNx layer in the multilayer stack, is calculated.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Materials Science and Engineering: A - Volume 494, Issues 1–2, 25 October 2008, Pages 324–328
نویسندگان
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