Practical spatial resolution of electron energy loss spectroscopy in aberration corrected scanning transmission electron microscopy

► Spatial resolution of aberration corrected STEM/EELS measured for Ti M2,3, Ti L2,3, V L2,3, Mn L2,3, La N4,5, La N2,3 La M4,5 and Sr L3 edges using oxide superlattices. ► EELS signals recorded using large collection angles are peaked at atomic columns. ► The FWHM of the EELS profiles agrees with Egerton's empirical delocalization model for Ti, V, and Mn edges in thin samples. ► The FWHM of the Sr and La edges is larger than the model's prediction because of scattering by heavy atomic columns.