A quantitative analysis of a multi-phase polycrystalline cubic boron nitride tool material using DualEELS

► We quantify a complex multi-phase material, polycrystalline boron nitride material. ► We apply an STEM-EELS-SI based methodology with MLLS fitting on this material. ► All phases are quantified (cBN, Ti(C,N), TiB2, Al2O3 and AlN). ► The surface oxidation of Ti(C,N) and AlN as well as the amorphisation of α-Al2O3 are evaluated.