The history of hard CVD coatings for tool applications at the University of Technology Vienna

► The history of CVD in Vienna. ► Conventional carbide and nitride coatings, e.g. TiN, Ti(C,N), ZrC, (Ti,Zr)C. ► The alpha-Al2O3 CVD process. ► Corrosion resistant coatings, e.g. TaxC, CrxCy. ► Superhard coatings, e.g. diamond, c-BN.