Studies on Electron Beam Evaporated WO3 Thin Films

Among Transition metal oxides, tungsten trioxide (WO3) is one of the most interesting electrochromic materials, which can be colored through electro-, photo- and thermo chromic processes. The interesting physical properties of these films allow practical applications such as energy saving windows, anti glare rare view mirrors and multicolor electrochromic devices. In this view of tremendous applications, WO3 thin films were deposited by electron beam evaporation technique onto well cleaned glass, Indium Tin Oxide (ITO) coated glass substrates and Si wafer at different substrate temperatures. The present work reports on the influence of the substrate temperature on the optical and structural properties. The crystallization of WO3 thin films starts, as we are raising the substrate temperature. Atomic Force Microscopy (AFM) measurements have been carried out in order to understand the growth mechanism