Hall effect sensors on the basis of carbon material

• Carbon films were grown by CVD method with a short-time acetylene inflow.
• The films consisted of CNT and bundles of them, and graphene-like carbon structures.
• Magnetic field sensitivity of 3000 Ω/T was observed in the carbon films.
• The Hall sensor with an active area size of 0.13×0.13 μm2 had S=1140 Ω/T.

Carbon films were fabricated on oxidized silicon substrates coated by treated bi-layer catalyst film using a chemical vapor deposition (CVD) method with a short-time acetylene inflow. The films consisted of carbon nanotubes and bundles of them, and graphene-like carbon nanostructures. Unusually high magnetic field sensitivity (3000 Ω/T) obtained from Hall measurements was observed in the films. The effect of scaling the size of the Hall sensor from carbon films on its magnetic field sensitivity has been investigated. The sensitivity of the Hall sensor with an active area size of 0.13×0.13 µm2 was found to be 1140 Ω/T, which is much higher than reported in the literature. This carbon material is promising for the fabrication of Hall effect sensors of submicron size.