Formation of porous nickel nanosystems using alumina membranes as templates for deposition

• A new method of Ni porous nanosystems formation with help of alumina membranes has been developed.
• Ni porous structures formation mechanisms have been investigated.
• New peculiarities of growth mechanism near equilibrium conditions have been found.

A new technological approach has been proposed to obtain ordered porous nickel nanoclusters consisting of weakly connected uniform nanocrystals less than 10 nm in diameter. The near-equilibrium condensation conditions are used in combination with ultra-thin alumina membranes (UTAM) as templates. The low density nickel vapor flow obtained by magnetron sputtering at low discharge power was directed into the nm sized pores of the alumina membrane by means of perpendicular tubes positioned in the target-substrate area. The selective formation of porous structures inside the alumina membrane pores is caused by a low supersaturation of the nickel vapor and by a high temperature gradient along the pore length.