Low-frequency dielectric functions of dense and chevronic thin films of parylene C

Dense and chevronic thin films of parylene C were fabricated using a physicochemical vapor deposition technique and their dielectric functions were measured as functions of frequency (from 0.1 Hz to 0.1 MHz) and temperature (from −140 °C to 260 °C) using an impedance meter. The real part of the dielectric function of the chevronic thin film was considerably higher than that of its dense counterpart. Higher dielectric strength, loss factor and conductivity for the chevronic parylene suggest an amorphous phase which are more present in this semi-crystalline polymer. X-ray diffractions are now envisaged to confirm this assumption.

► Dense and chevronic thin films of parylene C (PPXC) were grown using a PCVD technique.
► The dielectric constant of chevronic morphology is 5 times greater than the dense.
► Morphology and present lower dissipation factor.
► The dissipation factor of chevronic parylene is lower than the dense in the whole temperature range.
► Parylene C of fibrous volumetric morphology is a promising insulator for new applications.