Application of in situ chloride-generated route to Ti5Si3 nanowires from and on Si substrate

► In situ chloride-generated route has been extended to synthesize Ti5Si3 nanowires. ► The shortcomings from the direct use of titanium chloride were well avoided. ► Si substrate functions as both Si source and substrate for depositing products. ► Synthesis and integration of product on Si substrate is accomplished by one step. ► The Ti5Si3 nanowires on Si substrate showed promising field-emission properties.