Focused ion beam milled pattern structures induced by laser pulse on AgInSbTe phase change films

Uniform and regular pattern structure array were fabricated on carbon (20 nm) /AgInSbTe (200 nm) / glass film by laser direct-writing technology with green and blue laser, respectively. The focused ion beam was used to mill the patterned structures to obtain the morphology inside the structures. The microscopy results indicate that the interior of the structure is hollow and the material is resolidified. Many shrinkage cavities and pores, the main characteristics of rapid solidification, were found inside the structures. The strong convection flow from the center of the molten pool to its periphery was the main cause of microbump formation. Material volume expansion from solid to liquid, and even to gas, also contributed to bump formation.

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► Uniform and regular pattern structure array were fabricated by LDW.
► FIB was used to mill the structures to obtain the morphology inside the structures.
► Interior of the structure is hollow and the material is resolidified.
► Main characteristic of rapid solidification was found inside the structures.
► Strong convection flow from center of molten pool to periphery was a reason for microbump formation.