Nanocrystalline yttria films by plasma-assisted liquid injection (PA-LI) CVD technique using metallorganic precursors

Nanocrystalline cubic Y2O3 film deposition by PA-LICVD was studied at 773 K in a N2/O2 plasma environment with methanol and triglyme solution of aquatris(2,2,6,6-tetramethyl-3,5-heptanedionato)yttrium(III) and its polyether adduct complexes as precursors. The X-ray powder patterns are analyzed and found to be triclinic and monoclinic for Y(tmhd)3·H2O(1) and Y2(tmhd)6·triglyme (2). Y2O3 film with (111) plane as the dominant orientation was obtained on graphite under a deposition pressure of 0.8–1.2 mbar.