Characterization of effects and model of voids induced by high current density tungsten ion implantation

Tungsten ions of low energy and high current densities were implanted into H13 steel to investigate the void effects of heavy ion implantation. The voids induced by ion implantation were examined by high voltage electron microscopy (HVEM). The abnormal tungsten concentration depth profile was characterized by Rutherford backscattering spectroscopy (RBS). Experimental results of wear and hardness indicated that the formation of voids had a great influence on the surface mechanical properties of H13 steel. A new spikes model can be used to qualitatively explain the voids formation and their effects.