Model for micropipe formation in 6H-SiC single crystal by sublimation method

The micropipe formation in 6H-SiC single crystal fabricated by sublimation method has been investigated via a stacking fault with a core of inclusion model. Sizes, shapes and the density of micropipes were investigated and the inclusions in the micropipes and the stacking faults (SFs) were analyzed. SFs and inclusions are the two necessary conditions for the formation of the micropipes. The shapes of micropipes are determined by the SFs tracks, and their sizes and density are mainly done by the sizes and number of the inclusions.