A periodic magnetic field assisted chemical vapor deposition technique to fabricate diamond film with preferred orientation

• Periodic magnetic field was initially used to deposit oriented diamond film.
• Influence of angular frequency (ωf) on facet orientation was studied.
• Lower ωf favored (110) orientation while higher ωf facilitated (100) orientation.
• Diamond films with (110) orientation exhibited better field emission properties.

Microcrystalline diamond films with an orientation evolution were initially deposited through periodic magnetic field assisted hot filament chemical vapor deposition system (PMF-HFCVD). The results indicated that lower angular frequency (ωf) favored the (110) orientation while higher ωf facilitated the (100) orientation. We attributed this evolution to the effect of increasing collision possibility with increasing angular frequency of the magnetic field. In addition, the films with (110) orientation exhibited better electron field emission properties than that with (100) orientation.