کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1657272 1517615 2015 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Laser-induced deposition of nanostructured copper microwires on surfaces of composite materials
ترجمه فارسی عنوان
رسوب لیزر میکروویو های مس نانوساختار بر روی سطوح مواد کامپوزیتی
کلمات کلیدی
رسوب شیمیایی مایع فیزیکی ناشی از لیزر، فلز مس، اتصالات داخلی، سطحی
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فناوری نانو (نانو تکنولوژی)
چکیده انگلیسی


• Laser-assisted liquid-phase copper deposition is affected by substrate surface type.
• Two-phase surface allows depositing conductive copper lines utilizing laser.
• Dispersity of defects on interfaces may be described in terms of statistical modeling.

Microelectronics industry is growing fast and the rate of new devices' development increases every year. Therefore, methods for simple and high-precision metal coating on dielectrics are needed. Existing methods do not allow performing the high-precision metal deposition without using photomasks, while making a photomask for each prototype is a long and expensive process. One of the methods of maskless metal deposition is laser-induced chemical liquid-phase deposition (LCLD). In this work we show the effect of substrate surface type on a result of LCLD. Deposited copper structures were characterized by SEM, EDX and impedance spectroscopy. The results show that laser-induced copper deposition is highly affected by the surface being a homogeneous or composite material. It was found that the deposits with low resistivity and high quality metal localization mostly appear on the two-phase surfaces. In contrast, deposits on one-phase surfaces exhibited poor topology of copper material. Statistical modeling was involved to describe this phenomenon.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Surface and Coatings Technology - Volume 264, 25 February 2015, Pages 187–192
نویسندگان
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