The effect of deposition parameters on the mechanical properties of Cr–C–N coatings

• The effect of target current (TC) on the structure and wear behavior of Cr–C–N coatings was studied.
• The Cr–C–N coatings at a TC less than 2 A exhibit an amorphous DLC structure.
• The amorphous structure exhibits lower friction coefficient and better wear resistance.
• The Cr–C–N coatings at a TC greater than 3 A exhibit a crystalline structure.
• The crystalline structure exhibits higher friction coefficient and poor wear resistance.

Cr–C–N coatings were deposited on a high-speed tool steel and Si wafer in Ar/N2/C2H2 plasma with various fixed target currents (1–5 A) using a reactive magnetron sputtering process. This study investigates the effect of the target current on the coating structure and the mechanical properties of the Cr–C–N coatings. Experimental results indicate that the target current (TC) clearly affects the coating structure and mechanical properties. X-ray diffraction results show that the Cr–C–N coating structure can be separated into two categories. The Cr–C–N coatings with a TC less than 2 A exhibit an amorphous DLC structure, while the Cr–C–N coatings with a TC greater than 3 A exhibit a crystalline structure. The Cr–C–N coatings with an amorphous DLC structure exhibit a lower friction coefficient, while the Cr–C–N coatings with a crystalline structure exhibit a higher friction coefficient. The Cr–C–N coatings with a lower friction coefficient exhibit a lower wear rate.