کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1657524 1517632 2014 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Investigation of the properties of amorphous carbon films obtained in a supersonic gas jet
ترجمه فارسی عنوان
بررسی خواص فیزیکی کربن آمورف به دست آمده در یک جت گاز فوق سبک
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فناوری نانو (نانو تکنولوژی)
چکیده انگلیسی


• Amorphous carbon films obtained in supersonic plasma jet are composed of two phases.

Amorphous carbon films on silicon, obtained in the supersonic gas jet containing dimers (C2), are investigated. The plasma jet is generated by the disk magnetohydrodynamic plasma accelerator in which methane is used as the plasma-forming gas. The resulting layers consist of two phases; their relation depends on the distance from the jet nozzle to the substrate. It was shown that the resulting hydrogenated carbon phase is easily removed during etching in the oxygen plasma. Scanning electron microscopic and ellipsometric measurements were carried out. The data on the adsorption activity of the layers with respect to alcohols, aromatic hydrocarbons and heptane were obtained.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Surface and Coatings Technology - Volume 246, 15 May 2014, Pages 46–51
نویسندگان
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