Low temperature synthesis of Al doped ZnO thin films by facing target sputtering

► High electrical and optical properties of Al-doped ZnO for transparent conductive oxide films. ► It is possible to use low temperature synthesis with plastic substrates. ► To retain the advantages of the FTS system as well as to propose a new type of doping concept. ► TCO performance was derived by the figure of merit (13.4 mΩ− 1).