Mechanical properties and antibacterial behaviors of TaN-(Ag,Cu) nanocomposite thin films after annealing

► TaN-(Ag,Cu)'s antibacterial efficiency was better than that of TaN-Ag or TaN-Cu. ► Tribological properties were much improved, comparing with those of TaN. ► Tribological properties were similar to TaN-Ag, and better than TaN-Cu. ► Annealing temperature for TaN-(Cu,Ag) can be as low as 200 °C. ► Being annealed at 200 °C, the film shows good antibacteria and antiwear behaviors.