Influence of annealing on mechanics behaviors of oxygen-implanted layer on Ti6Al4V by plasma-based ion implantation

► Annealing has an obvious influence on mechanics behavior of the implanted layer ► The annealing at 650 °C induces a hardness valley value ► Annealing at below 650 °C makes hardness peak broad and shift to substrate ► The annealing samples have a higher elasticity recover than the implanted sample.