Characteristics of La0.7Sr0.3MnO3 − δ films treated by oxygen plasma immersion ion implantation

► Oxygen implantation-annealing decreases effectively the vacancy defects of the films. ► Annealing cannot remove the effect of oxygen implantation on the structure of films. ► Oxygen PIII can adjust effectively TMI of the La0.7Sr0.3MnO3 − δ films. ► The higher TMI of films results from the enhancement of double-exchange interaction. ► Oxygen implantation has a small effect on room temperature emissivity of the films.