Reflectance, transmittance, and absorbance of ZnO implanted with 60Â keV Sn+ ions

► Sharpness of the typical reflectance feature gradually degraded with implantation dose. ► Thickness of the implanted layer was ~ 45 nm, which agreed with SRIM calculations. ► Similar to DL band PL peak, the absorption tail red-shifted with tin implantation dose. ► The red-shifts were not caused by relative increase in concentration of LiZn.