Phase formation tuning of oxygen-implanted layer on Ti6Al4V and Ti by annealing

► Annealing was used to tune phase formation in the oxygen‐implanted layer. ► The annealing in atmosphere could promote phase formation and transformation. ► The annealing induces the formed rutile growth for higher voltage implantation. ► The annealing can precipitate mixture phase for lower voltage implantation. ► The phase formation temperature is far lower for Ti compared with Ti6Al4V.