Effect of the Si content on the structure, mechanical and tribological properties of CrN/AlSiN thin films

► CrN/Al(Si)N multilayered thin films were deposited by arc plasma cathodic systems. ► CrN/AlN coating exhibited hardness of 32 GPa, high COF and low wear resistance. ► CrN/AlSiN coatings exhibited superhardness, very low COF and excellent wear resistance. ► While increasing the Si content, the hardness and wear resistance increase. ► Mechanical behavior of a-AlSiN models with various Si content was simulated.