Arc deposition of Ti-Si-C-N thin films from binary and ternary cathodes - Comparing sources of C

► Arc deposition of Ti-Si-C-N from binary and ternary cathodes is compared. ► Carbon supplied either as gaseous CH4 or alloyed in cathode yields similar films. ► Cubic-phase films of high hardness formed for as much as 11 at.% Si and 20 at.% C. ► Structure and properties systematically studied with respect to Si and C.