The development of high performance SnO2:F as TCOs for thin film silicon solar cells

► Thin films of SnO2:F deposited by atmospheric pressure chemical vapour deposition. ► Optical and electrical characteristics analysed for a series of growth temperatures. ► Optical and electrical characteristics analysed for a series of film growth rates. ► a-Si:H PV cells fabricated showing relationship to film properties. ► High cell current densities shown and efficiencies comparable to AGC-U based cells.