A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects

► We present a rotary reactor for performing thermal and plasma-enhanced ALD. ► Different coatings (Al2O3, TiO2 and AlN) were deposited. ► Glass beads, metal granules and micron powder and ZnO nanopowders were coated. ► Saturation was shown to be linearly dependent on the amount of powder surface. ► The coatings were conformal, uniformal and pinhole free.