Correlation between the surface characteristics and the duty cycle for the PACVD-derived TiN nanostructured films

► In this paper the TiN coatings have been grown at low temperature. ► Influence of the duty cycle on the tribological properties was evaluated. ► The new point was the dependence of the morphology on the duty cycle. ► The films grown at the low duty cycles were fine-grained. ► Also, TiN films had a denser structure and higher hardness in this condition.