کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1658871 1008362 2011 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Micro-patterning of Si(100) surfaces by ethanol cluster ion beams
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
Micro-patterning of Si(100) surfaces by ethanol cluster ion beams
چکیده انگلیسی
Based on these results, micro-patterning with various sizes in a range of 3 μm to 100 μm was performed on the Si(100) surfaces by the ethanol cluster ion irradiation. Various kinds of photo-resist mask patterns such as circle, square and line patterns were made on a Si(100) surface by photo-resist technique. The SEM observation showed that micro-patterns were prepared on the Si (100) surface by the ethanol cluster ion irradiation.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Surface and Coatings Technology - Volume 206, Issue 5, 25 November 2011, Pages 869-873
نویسندگان
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