کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1659650 | 1008387 | 2010 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Characterization of off-axis single target RF magnetron co-sputtered iron doped tin oxide films
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Characterization of off-axis single target RF magnetron co-sputtered iron doped tin oxide films Characterization of off-axis single target RF magnetron co-sputtered iron doped tin oxide films](/preview/png/1659650.png)
چکیده انگلیسی
The iron concentration in the coating was controlled in the range from 0 up to 5 at.% by two basic external parameters, the fraction of the iron stripe directly in the erosion zone and the RF power. The deposition process was reproducible and deposited substoichiometric Fe:SnO2 films were homogenous, flat, amorphous and thermally stable up to post deposition annealing at 600 °C. The elevated deposition temperatures up to 400 °C and post annealing up to 600 °C for 10 min or 400 °C for 25 h had no significant influence on the composition, the topology and the structure of coatings. The iron dopant in the film has probably α-Fe2O3 bonding structure.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Surface and Coatings Technology - Volume 205, Supplement 1, 25 December 2010, Pages S120-S124
Journal: Surface and Coatings Technology - Volume 205, Supplement 1, 25 December 2010, Pages S120-S124
نویسندگان
Martin Kormunda, Jaroslav Pavlik, Anna Mackova, Petr Malinsky,