Electrical and optical properties of In–Zn–Sn–O thin film deposited on polymer substrates through facing targets co-sputtering system

The Indium Zinc Tin Oxide (IZTO) thin films for use as a transparent electrode in flexible display were deposited on polycarbonate (PC) and polyethersulfone (PES) and glass substrates at room temperature by facing targets sputtering (FTS). When two sheets of targets are installed on an FTS system, one of target is IZO and other is ITO. As a result, we could prepare the IZTO thin films with the resistivity of under 10− 4 [Ω cm] and IZTO thin films deposited on PC, PES and glass substrate showed an average transmittance over 80% in visible range (400–800 nm) in all IZTO thin films except for IZTO thin film that was deposited in a filled chamber with pure Ar gas.